Make : Taylor Hobson
Model : Talysurf CLI 2000
Metrology Specification:
|
Measurement Type |
Used Gauge |
|
contact measurement |
Inductive gauge with Diamond tip |
|
non-contact large range measurement |
Laser gauge |
Scanning Range:
|
Used gauge |
Large Range |
Middle Range |
Small Range |
|
Inductive Gauge |
1.7mm – 42nm |
490um – 7.8nm |
103um – 1.6nm |
|
Vertical resolution of Inductive gauge |
40nm |
10nm |
2nm |
|
Accuracy Inductive Gauge |
0.3um |
50nm |
10nm |
|
Laser Gauge |
Single Range (9.9mm – 166nm) |
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|
Vertical resolution of Laser gauge |
1um |
||
|
Accuracy Laser Gauge |
The accuracy is equal to the resolution on diffusing surfaces with homogeneous optical properties. |
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|
Minimum spacing |
X: 0.5um; Y: 0.5um; Z: 0.5um. |
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|
Max spacing |
X: 200mm; Y: 200mm; Z: As defined by the range of the gauge. |
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|
Max. Measurement speed(X,Y axis) |
30000um/s (= 30mm/s) |
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Sample Specification:
|
Sample dimensions |
200mm X 200mm X 200mm |
|
Sample Weight |
Max. 15kgs |
|
Sample phase |
Solids. |
Thickness measurement unit is a useful tool in industrial as well as research leevel samples. It can be used for surface profiling, thickness measurement of coatings and deposits , roughness parameter and similar surface evaluation parameters. Depending upon the sample properties and the dimensions of the coatings appropriate gauge can be chosen.
Dr G J Phatak (Instrument in charge) Office No: 020-25989273 ext 206
Email id: gjp@cmet.gov.in.
II). Characterization Incharge, Office no 020-25989273
Working principle of Inductive Gauge:
Inductive gauge will work on the based on the CONTACT MEASURMENT principle, means inductive gauge consists of tracing a surface with a tactile gauge equipped with a diamond stylus tip. When the sample is traced, the up and down movements of the stylus arm result in a change in the inductance of the electrical circuit . The analysis of these variations allows the calculation of the height movements along the Z-axis covered by the stylus arm.
Working principle of the Laser gauge:
Laser gauge will work on the NON-CONTACT LARGE RANGE MEASURMENT principle. The technique used for the triangulation gauge deduces the height of a surface point by sensing the position of a laser spot in the surface using a detector placed at a certain angle away from the incoming laser beam.